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Process Gas Equipment

Process Gas Equipment

High purity (UHP) regulators used for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

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#AP3260- Diaphragm Valve- Manually Operated- Metal Seated

SMC

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other ..

#AZ3542 & AZ4542- Diaphragm Valve- Air Operated

SMC

Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other c..

#AP1500- Single Stage Regulator for Ultra High Purity- Low Flow-

SMC

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean ..

#AK14PAT- Pneumatic Actuation Pressure Regulator- Intermediate Fl

SMC

Series AK regulator was designed for general use in a wide variety of applications. The series is av..

#AP72- Vacuum Generator- Module

SMC

There are four vacuum generator models to choose from - two simple vacuum generators, AP 7 and AP70,..

#KT10- Single Stage Regulator- Welded Connection- Low Flow

SMC

The KT10 and KT12 series are regulators used in gas delivery systems to reduce the pressure to a low..

#AZ9200- Single Stage Regulator for Ultra High Purity- High Flow

SMC

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean ..

#AP14PAT- Pneumatic Actuation Pressure Regulator- Intermediate Fl

SMC

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other ..

#AP3800/AP3900- Diaphragm Valve- Manually Operated for High Flow

SMC

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other ..

#AP1900- Single Stage Regulator for Ultra High Purity- Low to Int

SMC

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean ..

#AP500- Single Stage Compact Regulator for Ultra High Purity

SMC

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean ..

#BP1000- Welded Connection Back Pressure Regulator for Ultra High

SMC

Series BP regulator was designed for general use in a wide variety of applications. Available option..

#AP7 & 70- Vacuum Generator

SMC

There are four vacuum generator models to choose from - two simple vacuum generators, AP 7 and AP70,..

#AP2700- Two Stage Regulator for Ultra High Purity- Intermediate

SMC

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean ..

#BP1000- Back Pressure Regulator for General Applications

SMC

Series BP regulator was designed for general use in a wide variety of applications. Available option..

#AP4600 Diaphragm Valve- Manually Operated Type

SMC

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other ..

#AP3600- Diaphragm Valve- Manually Operated

SMC

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other ..

#AZ15PA- Pneumatic Actuation Pressure Regulator- Low Flow (Tied-d

SMC

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean ..

#AZ1100- Single Stage Regulator for Delivery of Sub-atmospheric P

SMC

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean ..

#AP71- Vacuum Generator- Module

SMC

There are four vacuum generator models to choose from - two simple vacuum generators, AP 7 and AP70,..

#KT12- Single Stage Regulator- High Flow

SMC

The KT10 and KT12 series are regulators used in gas delivery systems to reduce the pressure to a low..

#SL5500- Single Stage Regulator for Ultra High Purity- Low Flow

SMC

Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean ..

#AP3200- Diaphragm Valve- Air Operated- Metal Seated

SMC

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor ..

#AP1000- Single Stage Regulator for Ultra High Purity- Low to Int

SMC

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean ..

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